Shutdown lampoly SNF 2006-06-05 13:22:56: error: turbo pumping system state not ready

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Tue Jul 18 21:35:45 PDT 2006


`Turbo has been changed and repaired water leak on lower
electrode assembly. Cycled wafers(25) using recipe 25 w/out
problem. 




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