Problem lampoly SNF 2006-07-24 18:23:38: Error #80, Pressure.

king at snf.stanford.edu king at snf.stanford.edu
Mon Jul 24 18:23:38 PDT 2006


"Pressure hard tolerance exceeded during an RF on step."
This happened during the last RF step on Recipe #77 , which is an overetch step.   
These are all dummy wafers, with one stuck in the chamber.




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