Problem lampoly SNF 2006-07-24 18:23:38: Error #80, Pressure.

king at king at
Mon Jul 24 18:23:38 PDT 2006

"Pressure hard tolerance exceeded during an RF on step."
This happened during the last RF step on Recipe #77 , which is an overetch step.   
These are all dummy wafers, with one stuck in the chamber.

More information about the lampoly-pcs mailing list