Problem lampoly SNF 2006-07-24 19:43:13: Main etch pressure has been unstable

king at snf.stanford.edu king at snf.stanford.edu
Mon Jul 24 19:43:13 PDT 2006


The tolerance is set to 99% so it doesn't fail, but it's been as much as 50% up or down in the middle of a 2 min etch.  Also am getting an overly high (~985V) bias voltage for all bare Si wafers.  The bottom RF reflected power is running about 25W out of 45 forward.  
The good news is that is does etch poly.  :^)  Thanks ahead of time.




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