Problem lampoly SNF 2006-07-25 17:43:59: RF stabilization problem recipe 2

riteshj at snf.stanford.edu riteshj at snf.stanford.edu
Tue Jul 25 17:44:00 PDT 2006


in the overetch step, RF takes a good 4-5 secs to stabilize and earlier used to be instantaeous. another person also faced the same problem. 




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