From cbaxter at snf.stanford.edu Thu Jun 1 16:18:55 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 1 Jun 2006 16:18:55 -0700 Subject: Problem lampoly SNF 2006-05-30 18:19:50: No HBr usage ... Message-ID: hbr is back online From chozone at snf.stanford.edu Fri Jun 2 18:33:32 2006 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Fri, 2 Jun 2006 18:33:32 -0700 Subject: Problem lampoly SNF 2006-06-02 18:33:32: error(squence,pump) Message-ID: a wafer in the inter lock chmber From cbaxter at snf.stanford.edu Mon Jun 5 09:02:11 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Jun 2006 09:02:11 -0700 Subject: Problem lampoly SNF 2006-06-02 18:33:32: error(squence,pump) Message-ID: recovered stuck wafer From riteshj at snf.stanford.edu Mon Jun 5 13:22:57 2006 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Mon, 5 Jun 2006 13:22:57 -0700 Subject: Shutdown lampoly SNF 2006-06-05 13:22:56: error: turbo pumping system state not ready Message-ID: one dummy wafer is in the load chamber just before the etch chamber From mtang at snf.stanford.edu Thu Jun 8 12:40:06 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 8 Jun 2006 12:40:06 -0700 Subject: Comment lampoly SNF 2006-06-08 12:40:03: Lampoly prognosis Message-ID: Hi everyone -- This is the word from Cesar. The turbopump is unusual, so we don't have a handy backup that can be installed. (A spare one would run $45K and since the last time we replaced this was over six years ago, it did not seem to make sense to stock a unique spare.) Cesar has found a local repair service. They will guarantee a two week turnaround, but think they may be able to turn it around in a week. If you desperately need lampoly etching, the Berkeley Microlab has a similar system/process (several people use lampoly here when their system is down.) From maurice at snf.stanford.edu Thu Jun 22 17:29:04 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 22 Jun 2006 17:29:04 -0700 Subject: Shutdown lampoly SNF 2006-06-22 17:29:03: water leak Message-ID: Robin Discovered Water leaking from RF box under machine. RF cooling supply and return turned off. EPO hit