Shutdown lampoly SNF 2006-03-07 15:47:56: Lam poly etcher is on shut down

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Mar 17 18:11:02 PST 2006


Elmer and I  installed refurbished power supplies. Cal both
gases, pressure and temp, cycled wafer through the tool using
recipe#77 and also, etched one of Robbin sample wafer
without a problem.




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