From mtang at snf.stanford.edu Fri Nov 3 09:52:45 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 3 Nov 2006 09:52:45 -0800 Subject: Comment lampoly SNF 2006-09-19 15:58:59: He clamp flow slow to stabilize Message-ID: Sorry, old message. Resolved with a chamber clean by Cesar. From mtang at snf.stanford.edu Fri Nov 3 09:53:00 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 3 Nov 2006 09:53:00 -0800 Subject: Comment lampoly SNF 2006-09-28 16:17:54: Lower ER and Resist Edge Burning Message-ID: Resolved with a chamber clean by Cesar (thanks!) From junil at snf.stanford.edu Fri Nov 3 16:44:59 2006 From: junil at snf.stanford.edu (junil at snf.stanford.edu) Date: Fri, 3 Nov 2006 16:44:59 -0800 Subject: Problem lampoly SNF 2006-11-03 16:44:59: Exit Cassette Sense Not Ready Message-ID: From ericp at snf.stanford.edu Sat Nov 4 16:45:51 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 4 Nov 2006 16:45:51 -0800 Subject: Comment lampoly SNF 2006-11-04 16:45:51: Wafer (1) recovered, machine ok Message-ID: I ran a wafer sweep. One wafer recovered from XLL. It would be helpful when this machine fails, if users could write HOW MANY WAFERS are remaining in the machine. You can't tell if there's a wafer (or pieces of wafer) in the chamber without opening it up. Machine should be ok, Khahn is testing now... From cbaxter at snf.stanford.edu Mon Nov 6 08:17:01 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Nov 2006 08:17:01 -0800 Subject: Comment lampoly SNF 2006-11-04 16:45:51: Wafer (1) recovered, machine ok Message-ID: Vented main chamber and verfied no wafer inside the chamber. From cbaxter at snf.stanford.edu Mon Nov 6 08:17:08 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 6 Nov 2006 08:17:08 -0800 Subject: Problem lampoly SNF 2006-11-03 16:44:59: Exit Cassette Sense Not Ready Message-ID: From mtang at snf.stanford.edu Tue Nov 7 09:54:31 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 7 Nov 2006 09:54:31 -0800 Subject: Problem lampoly SNF 2006-11-07 09:54:30: Nonkiller alarms Message-ID: I'm starting to operate and came across some white alarms. This one was on the system before I started. Alarm 340: Internal timer will overflow in 72 hours. System must be restarted. This next one appeared once I started running wafers and the system was undergoing its system check before running. Alarm 307: something about MFC#8 did not zero within 3% of full scale. Looking through the log, it appears this error has happened a lot. System seems to run well (DC bias is even stable.) Just wanted to make sure these alarms were documented -- and ask, what do they mean? Mary From cbaxter at snf.stanford.edu Tue Nov 7 12:40:00 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 7 Nov 2006 12:40:00 -0800 Subject: Problem lampoly SNF 2006-11-07 09:54:30: Nonkiller alarms Message-ID: Reboot system and zeroed o2 and n2 mfcs.