From cbaxter at snf.stanford.edu  Mon Oct  2 09:29:44 2006
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 2 Oct 2006 09:29:44 -0700
Subject: Problem lampoly SNF 2006-09-28 14:57:48: etch rate and PR burning problems
Message-ID: <mailman.593.1356282343.4111.lampoly-pcs@snf.stanford.edu>

wet cleaned chamber, there was alot build up on the lower
electrode.



From chozone at snf.stanford.edu  Wed Oct 11 15:19:33 2006
From: chozone at snf.stanford.edu (chozone at snf.stanford.edu)
Date: Wed, 11 Oct 2006 15:19:33 -0700
Subject: Problem lampoly SNF 2006-10-11 15:19:32: The water chiller has failed
Message-ID: <mailman.594.1356282343.4111.lampoly-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Oct 11 15:50:44 2006
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 11 Oct 2006 15:50:44 -0700
Subject: Problem lampoly SNF 2006-10-11 15:19:32: The water chiller has failed
Message-ID: <mailman.595.1356282343.4111.lampoly-pcs@snf.stanford.edu>

Refilled heat exchanger with id water.



From chozone at snf.stanford.edu  Thu Oct 12 17:02:08 2006
From: chozone at snf.stanford.edu (chozone at snf.stanford.edu)
Date: Thu, 12 Oct 2006 17:02:08 -0700
Subject: Problem lampoly SNF 2006-10-12 17:02:07: Pressure is fluctuating a lot --> error
Message-ID: <mailman.596.1356282343.4111.lampoly-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Oct 13 09:20:09 2006
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 13 Oct 2006 09:20:09 -0700
Subject: Problem lampoly SNF 2006-10-12 17:02:07: Pressure is fluctuating a lot --> error
Message-ID: <mailman.597.1356282343.4111.lampoly-pcs@snf.stanford.edu>

zeroed the manometer.  ran test. with no problems