From huangzb at snf.stanford.edu Tue Sep 12 22:25:30 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 12 Sep 2006 22:25:30 -0700 Subject: Shutdown lampoly SNF 2006-09-12 22:25:29: red alarm error 252 Message-ID: system crash several times when loading clean recipe. wafer stuck inside when running clean1 recipe. Turbo pumping system is not ready for process to start. cannot clear the alarm. From cbaxter at snf.stanford.edu Wed Sep 13 08:06:33 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 13 Sep 2006 08:06:33 -0700 Subject: Shutdown lampoly SNF 2006-09-12 22:25:29: red alarm error 252 Message-ID: Recovered wafer from main chamber and re-teach throttle valve conttroller and verified pressure @ 10, 13 and 15 mt. From huangzb at snf.stanford.edu Sat Sep 16 11:38:03 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 16 Sep 2006 11:38:03 -0700 Subject: Problem lampoly SNF 2006-09-16 11:38:03: cannot load recipe Message-ID: Can not load recipe from hard disk From huangzb at snf.stanford.edu Sat Sep 16 15:32:37 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 16 Sep 2006 15:32:37 -0700 Subject: Shutdown lampoly SNF 2006-09-16 15:32:36: operation system not respond Message-ID: operation system not respond From cbaxter at snf.stanford.edu Sun Sep 17 08:10:17 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 17 Sep 2006 08:10:17 -0700 Subject: Shutdown lampoly SNF 2006-09-16 15:32:36: operation system not respond Message-ID: No 24vdc, found blown 1amp fuse. Changed 1amp fuse and reboot system. From cbaxter at snf.stanford.edu Sun Sep 17 08:10:35 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 17 Sep 2006 08:10:35 -0700 Subject: Problem lampoly SNF 2006-09-16 11:38:03: cannot load recipe Message-ID: Changed blown 1amp fuse. From rwoo at snf.stanford.edu Mon Sep 18 11:03:32 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Mon, 18 Sep 2006 11:03:32 -0700 Subject: Problem lampoly SNF 2006-09-18 11:03:28: all recipes lost Message-ID: The hard drive appears to have lost all of the recipes. The system still runs fine but recipes need to be re-entered and saved. From rwoo at snf.stanford.edu Tue Sep 19 15:58:59 2006 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Tue, 19 Sep 2006 15:58:59 -0700 Subject: Comment lampoly SNF 2006-09-19 15:58:59: He clamp flow slow to stabilize Message-ID: On first wafer of the day, He clamp flow takes 5+ minutes to stabilize. Subsequent wafers run without delay. From bchui at snf.stanford.edu Tue Sep 19 21:21:35 2006 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Tue, 19 Sep 2006 21:21:35 -0700 Subject: Problem lampoly SNF 2006-09-19 21:21:34: fluctuating He pressure; valve won't stop actuating Message-ID: Like prev user reported, He clamp pressure was highly unstable for the first 2 wafers; OK starting from 3rd wafer. Also, some valve inside could be heard constantly actuating whenever a wafer was being transferred into or out of the etch chamber. From cbaxter at snf.stanford.edu Thu Sep 21 13:12:46 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Sep 2006 13:12:46 -0700 Subject: Problem lampoly SNF 2006-09-19 21:21:34: fluctuating He pressure; valve won't stop actuating Message-ID: I ran 5 bare silicon wafer and backside he is stable. From cbaxter at snf.stanford.edu Thu Sep 21 13:14:58 2006 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Sep 2006 13:14:58 -0700 Subject: Problem lampoly SNF 2006-09-18 11:03:28: all recipes lost Message-ID: All recipe is back on the hardrive, the 5vdc on vme was low adjusted to 4.98vdc From mtang at snf.stanford.edu Thu Sep 21 13:38:23 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 21 Sep 2006 13:38:23 -0700 Subject: Problem lampoly SNF 2006-09-21 13:38:23: Lampoly update Message-ID: Good news: From mtang at snf.stanford.edu Thu Sep 21 13:39:18 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 21 Sep 2006 13:39:18 -0700 Subject: Problem lampoly SNF 2006-09-21 13:38:23: Lampoly update Message-ID: Wups! I didn't mean to do this. From tura at snf.stanford.edu Thu Sep 28 14:57:49 2006 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Thu, 28 Sep 2006 14:57:49 -0700 Subject: Problem lampoly SNF 2006-09-28 14:57:48: etch rate and PR burning problems Message-ID: Etch rate of HBr only recipe has gone down ~25% compared to may 2006 (~4 months ago). 80 sec etch burned PR (looks cloudy, unclear) in the outer ~1inch of the wafer, whereas the PR in the center looked normal (bullseye pattern) From mtang at snf.stanford.edu Thu Sep 28 16:17:54 2006 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 28 Sep 2006 16:17:54 -0700 Subject: Comment lampoly SNF 2006-09-28 16:17:54: Lower ER and Resist Edge Burning Message-ID: These are likely symptoms of excessive buildup in the chamber. Cesar plans to do the chamber clean/seasoning on Sunday evening. If you would like to use the system before then, make sure to check that the etch rate uniformity meets your process requirements.