Shutdown lampoly SNF 2006-09-12 22:25:29: red alarm error 252

huangzb at snf.stanford.edu huangzb at snf.stanford.edu
Tue Sep 12 22:25:30 PDT 2006


system crash several times when loading clean recipe. wafer stuck inside when running clean1 recipe. Turbo pumping system is not ready for process to start. cannot clear the alarm. 




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