Shutdown lampoly SNF 2006-09-12 22:25:29: red alarm error 252

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Sep 13 08:06:33 PDT 2006


Recovered wafer from main chamber and re-teach throttle
valve conttroller and verified pressure @ 10, 13 and 15 mt.




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