Problem lampoly SNF 2006-09-19 21:21:34: fluctuating He pressure; valve won't stop actuating

bchui at snf.stanford.edu bchui at snf.stanford.edu
Tue Sep 19 21:21:35 PDT 2006


Like prev user reported, He clamp pressure was highly unstable for the first 2 wafers; OK starting from 3rd wafer. Also, some valve inside could be heard constantly actuating whenever a wafer was being transferred into or out of the etch chamber.




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