Problem lampoly SNF 2006-09-28 14:57:48: etch rate and PR burning problems

tura at snf.stanford.edu tura at snf.stanford.edu
Thu Sep 28 14:57:49 PDT 2006


Etch rate of HBr only recipe has gone down ~25% compared to may 2006 (~4 months ago).
80 sec etch burned PR (looks cloudy, unclear) in the outer ~1inch of the wafer, whereas the PR in the center looked normal  (bullseye pattern)




More information about the lampoly-pcs mailing list