Comment lampoly SNF 2006-09-28 16:17:54: Lower ER and Resist Edge Burning

mtang at mtang at
Thu Sep 28 16:17:54 PDT 2006

These are likely symptoms of excessive buildup in the chamber.  Cesar plans to do the chamber clean/seasoning on Sunday evening.  If you would like to use the system before then, make sure to check that the etch rate uniformity meets your process requirements.

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