Comment lampoly SNF 2006-09-28 16:17:54: Lower ER and Resist Edge Burning

mtang at snf.stanford.edu mtang at snf.stanford.edu
Thu Sep 28 16:17:54 PDT 2006


These are likely symptoms of excessive buildup in the chamber.  Cesar plans to do the chamber clean/seasoning on Sunday evening.  If you would like to use the system before then, make sure to check that the etch rate uniformity meets your process requirements.




More information about the lampoly-pcs mailing list