From eenriquez at snf.stanford.edu Wed Aug 1 10:07:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Aug 2007 10:07:28 -0700 Subject: Shutdown lampoly SNF 2007-08-01 10:07:27: Cl2 work Message-ID: Pquest2 Cl2 tie in. From eenriquez at snf.stanford.edu Thu Aug 2 11:55:58 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Aug 2007 11:55:58 -0700 Subject: Shutdown lampoly SNF 2007-08-01 10:07:27: Cl2 work Message-ID: Cl2 work completed. Unable to perform the standard 24 hour pressure test. Instead, we ran a leak of the gas line from the P5000 etcher. Leak up rate of the line is 0.4 mT/min. From emyers at snf.stanford.edu Fri Aug 3 11:18:54 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 3 Aug 2007 11:18:54 -0700 Subject: Shutdown lampoly SNF 2007-08-03 11:18:52: Cl, HBr Concerns Message-ID: Need to verify gases following pquest2 tie-in From mtang at snf.stanford.edu Tue Aug 7 13:50:35 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 7 Aug 2007 13:50:35 -0700 Subject: Shutdown lampoly SNF 2007-08-07 13:50:34: Still checking out Cl2 and HBr gas lines Message-ID: We do not anticipate Cl2/HBr being available for the next few days. Apologies for the inconvenience. From eenriquez at snf.stanford.edu Wed Aug 15 12:38:03 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Aug 2007 12:38:03 -0700 Subject: Comment lampoly SNF 2007-08-15 12:38:03: Gas update Message-ID: Helium leak checked both the Cl2 ahd HBr gas panels and found no leaks. We found a small leak on the purge gas line. Also repaired the HBr excess flow switch. Now performing a 24 hour leak up test on the Cl2 line and continuing to pump out the HBr line. If the Cl2 line passes the leak test, we will turn both gases on by noon tomorrow. From cbaxter at snf.stanford.edu Thu Aug 16 12:34:50 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 16 Aug 2007 12:34:50 -0700 Subject: Shutdown lampoly SNF 2007-08-07 13:50:34: Still checking out Cl2 and HBr gas lines Message-ID: CL2 is back online.. From cbaxter at snf.stanford.edu Thu Aug 16 12:35:09 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 16 Aug 2007 12:35:09 -0700 Subject: Shutdown lampoly SNF 2007-08-03 11:18:52: Cl, HBr Concerns Message-ID: CL2 and HBR is back online.. From ericp at snf.stanford.edu Thu Aug 16 23:18:43 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 16 Aug 2007 23:18:43 -0700 Subject: Shutdown lampoly SNF 2007-08-16 23:18:42: failure to pump ELL Message-ID: Wafers in system. (Dummies only). Two wafers, one in ELL, one on loader. ELL will not pump. From eenriquez at snf.stanford.edu Fri Aug 17 09:47:28 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 09:47:28 -0700 Subject: Shutdown lampoly SNF 2007-08-16 23:18:42: failure to pump ELL Message-ID: Turn on load lock pump. Ran 2 wafers with no problems. From eenriquez at snf.stanford.edu Fri Aug 17 09:48:20 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Aug 2007 09:48:20 -0700 Subject: Comment lampoly SNF 2007-08-15 12:38:03: Gas update Message-ID: Chlorine and HBr are now available. From ericp at snf.stanford.edu Mon Aug 20 20:03:56 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 20 Aug 2007 20:03:56 -0700 Subject: Shutdown lampoly SNF 2007-08-20 20:03:55: failure to pump ELL Message-ID: Same exact problem as last week: Load lock cannot pump. I think this is a bigger problem than simply: "Turn on load lock pump. Ran 2 wafers with no problems." From cbaxter at snf.stanford.edu Tue Aug 21 16:21:22 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 21 Aug 2007 16:21:22 -0700 Subject: Comment lampoly SNF 2007-08-21 16:21:21: L/L Pump Error Message-ID: The procerss cooling valve for the l/l pump is sticking, I manually open and close valve and I disconnect the return process cooling line ands checked flow now flow is good at lease over 1gpm. I will let the pump run overnite to make sure it doe'nt overheat and shutdown before releasing tool back user's. From cbaxter at snf.stanford.edu Wed Aug 22 07:55:21 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 22 Aug 2007 07:55:21 -0700 Subject: Shutdown lampoly SNF 2007-08-20 20:03:55: failure to pump ELL Message-ID: L/L pump is ok, the problem was the process water cooling valve on the dry pump was not opening all the way opened. From mtang at snf.stanford.edu Wed Aug 22 10:34:07 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 22 Aug 2007 10:34:07 -0700 Subject: Comment lampoly SNF 2007-08-22 10:34:06: Cl2 unavailable later today Message-ID: A new Cl2 bottle is due in today. If it arrives as planned, maintenance will shut down the Cl2 line to pump out overnight in preparation for bottle change/panel upgrade tomorrow. Apologies for the inconvenience. Please make sure to check messages and Coral for Cl2 status. From eenriquez at snf.stanford.edu Wed Aug 22 16:53:26 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Aug 2007 16:53:26 -0700 Subject: Problem lampoly SNF 2007-08-22 16:53:26: Cl2 is unavailable Message-ID: Cl2 gas cylinder change in progress. From ericp at snf.stanford.edu Wed Aug 22 21:29:34 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 22 Aug 2007 21:29:34 -0700 Subject: Problem lampoly SNF 2007-08-22 21:29:33: failure to pump ELL Message-ID: Same error, but it's getting better: This time, the ELL did pump, but apparently not low enough. The Ai value for the vacuum sense went down to 320. (I'm not sure what it needs for crossover). Dummy wafers stuck. From cbaxter at snf.stanford.edu Thu Aug 23 13:46:59 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 23 Aug 2007 13:46:59 -0700 Subject: Problem lampoly SNF 2007-08-22 21:29:33: failure to pump ELL Message-ID: Changed entrance l/l convectron gauge. From eenriquez at snf.stanford.edu Thu Aug 23 15:35:45 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Aug 2007 15:35:45 -0700 Subject: Comment lampoly SNF 2007-08-23 15:35:40: Cl2 update Message-ID: Pumping down the gas line overnight. If no problems, we will turn on the Cl2 by 9:00am. From eenriquez at snf.stanford.edu Fri Aug 24 08:10:32 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:10:32 -0700 Subject: Comment lampoly SNF 2007-08-23 15:35:40: Cl2 update Message-ID: Cl2 is now available. From eenriquez at snf.stanford.edu Fri Aug 24 08:10:46 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:10:46 -0700 Subject: Problem lampoly SNF 2007-08-22 16:53:26: Cl2 is unavailable Message-ID: Cl2 is now available. From eenriquez at snf.stanford.edu Fri Aug 24 08:11:24 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Aug 2007 08:11:24 -0700 Subject: Comment lampoly SNF 2007-08-22 10:34:06: Cl2 unavailable later today Message-ID: Cl2 is now available. From mtang at snf.stanford.edu Mon Aug 27 11:24:25 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Aug 2007 11:24:25 -0700 Subject: Shutdown lampoly SNF 2007-08-27 11:24:25: RF Fault Message-ID: Everything looks fine until RF turns on. After a few seconds, the machine faults with an RF fault. The top electrode/reflected power seem OK; bottom forward power seems OK -- bottom reflected seems high. This was in the "breakthrough" step -- step 3 of program #1. Sorry, did not check other steps. From cbaxter at snf.stanford.edu Mon Aug 27 14:46:31 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Aug 2007 14:46:31 -0700 Subject: Shutdown lampoly SNF 2007-08-27 11:24:25: RF Fault Message-ID: Changed recipe#1 breakthru step bottom rf power to 50watts and cycled w/out problem.