From cbaxter at snf.stanford.edu Wed Dec 5 09:36:20 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Dec 2007 09:36:20 -0800 Subject: Shutdown lampoly SNF 2007-11-30 12:42:25: wafer stuck in the chamber Message-ID: Recovered wafer on chamber and wet cleaned From raneeyoo at snf.stanford.edu Thu Dec 6 22:20:22 2007 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Thu, 6 Dec 2007 22:20:22 -0800 Subject: Problem lampoly SNF 2007-12-06 22:20:21: bias voltage is low Message-ID: the bias voltages are low....BT=~-20V, ME=~-40-50 I did 14dummies and am doing more etch using dummies From cbaxter at snf.stanford.edu Fri Dec 7 06:54:56 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 7 Dec 2007 06:54:56 -0800 Subject: Problem lampoly SNF 2007-12-06 22:20:21: bias voltage is low Message-ID: Bias voltage is normal From mtang at snf.stanford.edu Mon Dec 10 09:03:55 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 10 Dec 2007 09:03:55 -0800 Subject: Shutdown lampoly SNF 2007-12-10 09:03:55: Chiller is off, needs restart Message-ID: From cbaxter at snf.stanford.edu Mon Dec 10 10:20:52 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 10 Dec 2007 10:20:52 -0800 Subject: Shutdown lampoly SNF 2007-12-10 09:03:55: Chiller is off, needs restart Message-ID: Started chiller and adjusted turbo purge.. From rik at snf.stanford.edu Wed Dec 12 01:02:03 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 12 Dec 2007 01:02:03 -0800 Subject: Shutdown lampoly SNF 2007-12-12 01:02:02: Wafer fell off the robot arm in LL Message-ID: Somehow the wafer fell off the robot arm in the load lock. In addition, the previously processed wafer has a weird etch pattern in the top left corner. It looks like the etch was very nonuniform in that patch. From cbaxter at snf.stanford.edu Wed Dec 12 08:53:16 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 12 Dec 2007 08:53:16 -0800 Subject: Shutdown lampoly SNF 2007-12-12 01:02:02: Wafer fell off the robot arm in LL Message-ID: Recovered wafer on entrance l/l and run 3 wafers w/out problem. also wet cleaned chamber. From cbaxter at snf.stanford.edu Thu Dec 13 10:23:43 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Dec 2007 10:23:43 -0800 Subject: Comment lampoly SNF 2007-11-30 12:49:52: the wafer inside Message-ID: From cbaxter at snf.stanford.edu Thu Dec 13 10:23:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Dec 2007 10:23:47 -0800 Subject: Comment lampoly SNF 2007-10-29 11:29:46: rf error Message-ID: From cbaxter at snf.stanford.edu Mon Dec 17 08:32:07 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 08:32:07 -0800 Subject: Shutdown lampoly SNF 2007-12-17 08:32:06: Shutdown for wet clean Message-ID: From cbaxter at snf.stanford.edu Mon Dec 17 11:06:54 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 11:06:54 -0800 Subject: Comment lampoly SNF 2007-12-17 11:06:53: Completed wet clean, chamber is purging. Message-ID: From cbaxter at snf.stanford.edu Mon Dec 17 13:32:13 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 17 Dec 2007 13:32:13 -0800 Subject: Shutdown lampoly SNF 2007-12-17 08:32:06: Shutdown for wet clean Message-ID: Wet clean completed.