Shutdown lampoly SNF 2007-11-30 12:42:25: wafer stuck in the chamber
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Wed Dec 5 09:36:20 PST 2007
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Problem lampoly SNF 2007-12-06 22:20:21: bias voltage is low
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Recovered wafer on chamber and wet cleaned
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Problem lampoly SNF 2007-12-06 22:20:21: bias voltage is low
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