Problem lampoly SNF 2007-12-06 22:20:21: bias voltage is low

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Thu Dec 6 22:20:22 PST 2007


the bias voltages are low....BT=~-20V, ME=~-40-50
I did 14dummies and am doing more etch using dummies




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