Shutdown lampoly SNF 2007-12-12 01:02:02: Wafer fell off the robot arm in LL

rik at rik at
Wed Dec 12 01:02:03 PST 2007

Somehow the wafer fell off the robot arm in the load lock. In addition, the previously processed wafer has a weird etch pattern in the top left corner. It looks like the etch was very nonuniform in that patch. 

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