Shutdown lampoly SNF 2007-12-12 01:02:02: Wafer fell off the robot arm in LL

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Dec 12 08:53:16 PST 2007


Recovered wafer on entrance l/l and run 3 wafers 
w/out problem. also wet cleaned chamber.




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