Shutdown lampoly SNF 2007-12-17 08:32:06: Shutdown for wet clean
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Dec 17 13:32:13 PST 2007
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Shutdown lampoly SNF 2007-12-17 08:32:06: Shutdown for wet clean
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Comment lampoly SNF 2007-12-17 11:06:53: Completed wet clean, chamber is purging.
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Wet clean completed.
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Shutdown lampoly SNF 2007-12-17 08:32:06: Shutdown for wet clean
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Comment lampoly SNF 2007-12-17 11:06:53: Completed wet clean, chamber is purging.
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