From sdogbe at snf.stanford.edu  Tue Jan  9 20:21:02 2007
From: sdogbe at snf.stanford.edu (sdogbe at snf.stanford.edu)
Date: Tue, 9 Jan 2007 20:21:02 -0800
Subject: Problem lampoly SNF 2007-01-09 20:21:01: Wafer dropped off robot arm
Message-ID: <mailman.610.1356282343.4111.lampoly-pcs@snf.stanford.edu>

Wafer fell off robot arm during transport into the etch chamber.



From eenriquez at snf.stanford.edu  Wed Jan 10 08:27:27 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 10 Jan 2007 08:27:27 -0800
Subject: Problem lampoly SNF 2007-01-09 20:21:01: Wafer dropped off robot arm
Message-ID: <mailman.611.1356282343.4111.lampoly-pcs@snf.stanford.edu>

Removed wafer.



From junil at snf.stanford.edu  Wed Jan 10 19:18:20 2007
From: junil at snf.stanford.edu (junil at snf.stanford.edu)
Date: Wed, 10 Jan 2007 19:18:20 -0800
Subject: Problem lampoly SNF 2007-01-10 19:18:20: 376 error
Message-ID: <mailman.612.1356282343.4111.lampoly-pcs@snf.stanford.edu>

error message is as follows : the initialize task is waiting for the gap to finish centering.



From cbaxter at snf.stanford.edu  Thu Jan 11 07:54:16 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 11 Jan 2007 07:54:16 -0800
Subject: Problem lampoly SNF 2007-01-10 19:18:20: 376 error
Message-ID: <mailman.613.1356282343.4111.lampoly-pcs@snf.stanford.edu>

Gap was jammed, release breake and reset gap.