From cbaxter at snf.stanford.edu Wed Jun 6 08:21:06 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 6 Jun 2007 08:21:06 -0700 Subject: Shutdown lampoly SNF 2007-05-29 09:12:07: HBR problem need to pump out line. Message-ID: HBR is back online.. From riteshj at snf.stanford.edu Sat Jun 16 12:52:51 2007 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Sat, 16 Jun 2007 12:52:51 -0700 Subject: Problem lampoly SNF 2007-06-16 12:52:51: CL2 flow rate out of range Message-ID: Cl2 flow rate is low (25 instaed of 40) and the recipe alarms ... From eenriquez at snf.stanford.edu Mon Jun 18 08:53:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Jun 2007 08:53:34 -0700 Subject: Problem lampoly SNF 2007-06-16 12:52:51: CL2 flow rate out of range Message-ID: Ray readjusted gas regulator pressure. From mtang at snf.stanford.edu Mon Jun 18 09:10:21 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 18 Jun 2007 09:10:21 -0700 Subject: Comment lampoly SNF 2007-06-18 09:10:20: Cl2 bottle pressure adjustment. Message-ID: Cl2 bottle pressure adjustment was to accomodate process on pquest -- it is sometimes hard to get a bottle pressure that keeps both lampoly and pquest happy. From ericp at snf.stanford.edu Mon Jun 25 22:05:50 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 25 Jun 2007 22:05:50 -0700 Subject: Shutdown lampoly SNF 2007-06-25 22:05:49: ELL would not pump Message-ID: wafers queued up normally, but ELL would not pump at all. Two wafers in system: One in ELL, one on the loader. 0 for 2 tonight. From cbaxter at snf.stanford.edu Tue Jun 26 09:23:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 26 Jun 2007 09:23:47 -0700 Subject: Shutdown lampoly SNF 2007-06-25 22:05:49: ELL would not pump Message-ID: The air line for the vacuum gate valve came off on the ell.