From eenriquez at snf.stanford.edu Wed May 2 09:53:59 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 09:53:59 -0700 Subject: Comment lampoly SNF 2007-05-02 09:53:59: Replaced Cl2 sensor Message-ID: Now waiting for Ted to Ok before Cl2 and BCl3 can be turned on. From eenriquez at snf.stanford.edu Wed May 2 14:40:32 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 May 2007 14:40:32 -0700 Subject: Shutdown lampoly SNF 2007-04-27 09:04:49: Cl2 bottle to be changed. Message-ID: Replaced bad Cl2 sensor. Ray verified that the Cl2 gas line is leak tight. BCl3 line was also ok. Verified flows at the tool. From chozone at snf.stanford.edu Tue May 8 23:19:27 2007 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Tue, 8 May 2007 23:19:27 -0700 Subject: Problem lampoly SNF 2007-05-08 23:19:26: No RF power Message-ID: Running is fine, no error but no RF power(No etch) From cbaxter at snf.stanford.edu Wed May 9 08:20:35 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 9 May 2007 08:20:35 -0700 Subject: Problem lampoly SNF 2007-05-08 23:19:26: No RF power Message-ID: Found both generator off. From cbaxter at snf.stanford.edu Wed May 9 08:53:03 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 9 May 2007 08:53:03 -0700 Subject: Shutdown lampoly SNF 2007-05-09 08:53:02: Process cooling water is shutoff for Tel system tie in. Message-ID: From eenriquez at snf.stanford.edu Wed May 9 16:24:40 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 May 2007 16:24:40 -0700 Subject: Shutdown lampoly SNF 2007-05-09 08:53:02: Process cooling water is shutoff for Tel system tie in. Message-ID: Turned water back on. Restarted turbo. From chozone at snf.stanford.edu Wed May 9 18:08:38 2007 From: chozone at snf.stanford.edu (chozone at snf.stanford.edu) Date: Wed, 9 May 2007 18:08:38 -0700 Subject: Problem lampoly SNF 2007-05-09 18:08:38: Very low HBR gas flow Message-ID: HBR set point is 200 , but real flow is only 13 sccm. Another setpoint is 50, but real flow is still around 13 sccm. From eenriquez at snf.stanford.edu Wed May 9 19:11:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 May 2007 19:11:50 -0700 Subject: Comment lampoly SNF 2007-05-09 19:11:49: No HBr Message-ID: Checked gas vault. The HBr controller appears to be on (not labeled) but the Cl2 gas controller is on remote standby. I did not want to reset it because I did not fully understand the whole set up. From eenriquez at snf.stanford.edu Thu May 10 07:39:37 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 May 2007 07:39:37 -0700 Subject: Problem lampoly SNF 2007-05-09 18:08:38: Very low HBR gas flow Message-ID: Mike found the valve in the gas panel that goes to the tools had been shut-off. Turned valve back on. Mike also found the Cl2 controller on remote shutdown. He reset the controller. Gas flow at the system checked OK. From eenriquez at snf.stanford.edu Thu May 10 07:39:50 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 May 2007 07:39:50 -0700 Subject: Comment lampoly SNF 2007-05-09 19:11:49: No HBr Message-ID: Mike found the valve in the gas panel that goes to the tools had been shut-off. Turned valve back on. Mike also found the Cl2 controller on remote shutdown. He reset the controller. Gas flow at the system checked OK. From eenriquez at snf.stanford.edu Mon May 14 12:28:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 May 2007 12:28:55 -0700 Subject: Shutdown lampoly SNF 2007-05-14 12:28:54: No cooling water Message-ID: Water shut-off due to TEL install. From cbaxter at snf.stanford.edu Mon May 14 13:54:07 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 14 May 2007 13:54:07 -0700 Subject: Shutdown lampoly SNF 2007-05-14 12:28:54: No cooling water Message-ID: Cooling water is back on, ramped up turbo to speed. From rwoo at snf.stanford.edu Sun May 20 09:51:02 2007 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sun, 20 May 2007 09:51:02 -0700 Subject: Shutdown lampoly SNF 2007-05-20 09:51:01: turbo pump and chiller errors due to power outage Message-ID: From cbaxter at snf.stanford.edu Mon May 21 08:10:24 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 May 2007 08:10:24 -0700 Subject: Shutdown lampoly SNF 2007-05-20 09:51:01: turbo pump and chiller errors due to power outage Message-ID: Reset system.. From cbaxter at snf.stanford.edu Mon May 21 09:01:27 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 May 2007 09:01:27 -0700 Subject: Shutdown lampoly SNF 2007-05-21 09:01:27: heat exchanger motor is shot. Message-ID: From cbaxter at snf.stanford.edu Mon May 21 13:43:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 21 May 2007 13:43:47 -0700 Subject: Shutdown lampoly SNF 2007-05-21 09:01:27: heat exchanger motor is shot. Message-ID: Changed lower heat exchanger motor. From cbaxter at snf.stanford.edu Tue May 29 09:12:08 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 29 May 2007 09:12:08 -0700 Subject: Shutdown lampoly SNF 2007-05-29 09:12:07: HBR problem need to pump out line. Message-ID: