From pradeep13 at snf.stanford.edu Thu Nov 1 18:12:55 2007 From: pradeep13 at snf.stanford.edu (pradeep13 at snf.stanford.edu) Date: Thu, 1 Nov 2007 18:12:55 -0700 Subject: Problem lampoly SNF 2007-11-01 18:12:51: RF tolerance problem intermittent Message-ID: Error "Recipe aborted RF hard tolerance exceeded during an RF on step." It came on on the over etch step intermittently. Towards the end of conditioning the wafers ran without a problem. From cbaxter at snf.stanford.edu Fri Nov 2 07:52:51 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 2 Nov 2007 07:52:51 -0700 Subject: Problem lampoly SNF 2007-11-01 18:12:51: RF tolerance problem intermittent Message-ID: Changed tuning setpoint and cycled w/out problem. From tura at snf.stanford.edu Fri Nov 30 12:42:27 2007 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 30 Nov 2007 12:42:27 -0800 Subject: Shutdown lampoly SNF 2007-11-30 12:42:25: wafer stuck in the chamber Message-ID: It gave a "Turbo not ready" alarm when the turbo was ON, Elmer reset the machine but the wafer that was in the chamber didn't come out. It has chosen to fall behind to save others. From tura at snf.stanford.edu Fri Nov 30 12:49:53 2007 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Fri, 30 Nov 2007 12:49:53 -0800 Subject: Comment lampoly SNF 2007-11-30 12:49:52: the wafer inside Message-ID: Please put the wafer inside the chamber into the box on the table next to lampoly that says "for the wafer inside lampoly". Thanks.