Problem lampoly SNF 2007-11-01 18:12:51: RF tolerance problem intermittent

pradeep13 at snf.stanford.edu pradeep13 at snf.stanford.edu
Thu Nov 1 18:12:55 PDT 2007


Error "Recipe aborted RF hard tolerance exceeded during an RF on step." It  came on on the over etch step intermittently. Towards the end of conditioning the wafers ran without a problem.  




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