Problem lampoly SNF 2007-11-01 18:12:51: RF tolerance problem intermittent

pradeep13 at pradeep13 at
Thu Nov 1 18:12:55 PDT 2007

Error "Recipe aborted RF hard tolerance exceeded during an RF on step." It  came on on the over etch step intermittently. Towards the end of conditioning the wafers ran without a problem.  

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