Shutdown lampoly SNF 2007-11-30 12:42:25: wafer stuck in the chamber

tura at snf.stanford.edu tura at snf.stanford.edu
Fri Nov 30 12:42:27 PST 2007


It gave a "Turbo not ready" alarm when the turbo was ON, Elmer reset the machine but the wafer that was in the chamber didn't come out. It has chosen to fall behind to save others.




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