From eenriquez at snf.stanford.edu Fri Oct 5 14:40:34 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 5 Oct 2007 14:40:34 -0700 Subject: Shutdown lampoly SNF 2007-10-05 14:40:33: HBr is not available. Message-ID: From eenriquez at snf.stanford.edu Wed Oct 17 07:51:56 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Oct 2007 07:51:56 -0700 Subject: Shutdown lampoly SNF 2007-10-05 14:40:33: HBr is not available. Message-ID: HBr is now available From eenriquez at snf.stanford.edu Wed Oct 17 07:52:19 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 17 Oct 2007 07:52:19 -0700 Subject: Problem lampoly SNF 2007-09-18 16:02:37: Cl2 NOT available. But OK for HBr. Message-ID: Cl2 is now available From mtang at snf.stanford.edu Wed Oct 17 16:03:25 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 17 Oct 2007 16:03:25 -0700 Subject: Shutdown lampoly SNF 2007-10-17 16:03:25: Loadlock pumpdown error Message-ID: The loadlock does not appear to pump down (remains at ATM.) Also, the MFC #8 autozero has repeated errors reported. From mtang at snf.stanford.edu Wed Oct 17 17:20:52 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 17 Oct 2007 17:20:52 -0700 Subject: Shutdown lampoly SNF 2007-10-17 16:03:25: Loadlock pumpdown error Message-ID: Elmer reset the loadlock pump. Ran 10 wafers. No additional errors. Did not run an etch rate -- would recommend doing so before committing wafers. The lower electrode RF does not always control well at 40 W, but does quite consistently at 45 W for the breakthrough step. This should not have a significant effect on etch characteristics if you wish to change. From chingmei at snf.stanford.edu Wed Oct 17 20:14:37 2007 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Wed, 17 Oct 2007 20:14:37 -0700 Subject: Shutdown lampoly SNF 2007-10-17 20:14:36: 40 entrance load lock pump down fail Message-ID: The process can't be run. Two substrates are stuck inside of the chamber From cbaxter at snf.stanford.edu Fri Oct 19 11:04:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 Oct 2007 11:04:47 -0700 Subject: Shutdown lampoly SNF 2007-10-17 20:14:36: 40 entrance load lock pump down fail Message-ID: Flushed process cooling on load lock pump, and also, added fomblin oil on gear box. cycled 5 wafers so far no problem. From cbaxter at snf.stanford.edu Fri Oct 19 11:04:54 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 19 Oct 2007 11:04:54 -0700 Subject: Problem lampoly SNF 2007-09-12 14:39:50: Turbo errors, cannot run the system Message-ID: From mtang at snf.stanford.edu Wed Oct 24 07:38:59 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 24 Oct 2007 07:38:59 -0700 Subject: Problem lampoly SNF 2007-10-24 07:38:58: User reports strange profiles Message-ID: Ching-Mei reports odd profiles on silicon pillars she etched on Saturday. Samples etched just before the system went down for gas issues had perfectly vertical side-wall pillars. Her recent samples look somewhat conic. From cbaxter at snf.stanford.edu Fri Oct 26 09:16:19 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 26 Oct 2007 09:16:19 -0700 Subject: Problem lampoly SNF 2007-10-24 07:38:58: User reports strange profiles Message-ID: verified l/r on cl2 and hbr (good) also, checked gas flow @20 to 80%. From rik at snf.stanford.edu Fri Oct 26 11:21:24 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Fri, 26 Oct 2007 11:21:24 -0700 Subject: Problem lampoly SNF 2007-10-26 11:21:23: RF power exceeding setpoint in recipe 1 step 7 at time = 7s Message-ID: Tried 3 wafers, with the same result on each. From cbaxter at snf.stanford.edu Mon Oct 29 08:10:03 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 29 Oct 2007 08:10:03 -0700 Subject: Problem lampoly SNF 2007-10-26 11:21:23: RF power exceeding setpoint in recipe 1 step 7 at time = 7s Message-ID: Changed rf low fat tuning setting, run dummie wafer w/out problem. From chingmei at snf.stanford.edu Mon Oct 29 11:29:46 2007 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Mon, 29 Oct 2007 11:29:46 -0700 Subject: Comment lampoly SNF 2007-10-29 11:29:46: rf error Message-ID: rf error shown up when my first wafer was in the chamber, but after cleaning the alarm once, it didn't show up again. (I ran 6 dummy wafers) From lwchang at snf.stanford.edu Mon Oct 29 15:41:56 2007 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Mon, 29 Oct 2007 15:41:56 -0700 Subject: Problem lampoly SNF 2007-10-29 15:41:56: alarm Message-ID: 307 gas#8 MFC auto zero error exceeds 3% of full scale From pradeep13 at snf.stanford.edu Mon Oct 29 17:33:21 2007 From: pradeep13 at snf.stanford.edu (pradeep13 at snf.stanford.edu) Date: Mon, 29 Oct 2007 17:33:21 -0700 Subject: Problem lampoly SNF 2007-10-29 17:33:21: intermittent error Message-ID: "Auto zero is more than 3% of full-scale" message flashes intermittently, after clearing the regular scrubber error. We ran no wafer, because of this. From cbaxter at snf.stanford.edu Tue Oct 30 09:56:34 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 Oct 2007 09:56:34 -0700 Subject: Problem lampoly SNF 2007-10-29 15:41:56: alarm Message-ID: Zeroed cl2 ansd sf6 mfc gas controller. From cbaxter at snf.stanford.edu Tue Oct 30 09:56:47 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 30 Oct 2007 09:56:47 -0700 Subject: Problem lampoly SNF 2007-10-29 17:33:21: intermittent error Message-ID: