Shutdown lampoly SNF 2007-10-17 16:03:25: Loadlock pumpdown error

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed Oct 17 17:20:52 PDT 2007


Elmer reset the loadlock pump.  Ran 10 wafers.  No additional errors.  Did not run an etch rate -- would recommend doing so before committing wafers.  
The lower electrode RF does not always control well at 40 W, but does quite consistently at 45 W for the breakthrough step.  This should not have a significant effect on etch characteristics if you wish to change.




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