Shutdown lampoly SNF 2007-10-17 16:03:25: Loadlock pumpdown error

[mtang at snf.stanford.edu]

Elmer reset the loadlock pump.  Ran 10 wafers.  No additional errors.  Did not run an etch rate -- would recommend doing so before committing wafers.  
The lower electrode RF does not always control well at 40 W, but does quite consistently at 45 W for the breakthrough step.  This should not have a significant effect on etch characteristics if you wish to change.