Shutdown lampoly SNF 2007-10-17 20:14:36: 40 entrance load lock pump down fail

chingmei at snf.stanford.edu chingmei at snf.stanford.edu
Wed Oct 17 20:14:37 PDT 2007


The process can't be run. Two substrates are stuck inside of 
the chamber




More information about the lampoly-pcs mailing list