Shutdown lampoly SNF 2007-10-17 20:14:36: 40 entrance load lock pump down fail

cbaxter at cbaxter at
Fri Oct 19 11:04:47 PDT 2007

Flushed process cooling on load lock pump,
and also, added fomblin oil on gear box. cycled
5 wafers so far no problem.

More information about the lampoly-pcs mailing list