Shutdown lampoly SNF 2007-10-17 20:14:36: 40 entrance load lock pump down fail

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Oct 19 11:04:47 PDT 2007


Flushed process cooling on load lock pump,
and also, added fomblin oil on gear box. cycled
5 wafers so far no problem.




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