Problem lampoly SNF 2007-10-24 07:38:58: User reports strange profiles

mtang at snf.stanford.edu mtang at snf.stanford.edu
Wed Oct 24 07:38:59 PDT 2007


Ching-Mei reports odd profiles on silicon pillars she etched on Saturday.  Samples etched just before the system went down for gas issues had perfectly vertical side-wall pillars.  Her recent samples look somewhat conic.  




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