Problem lampoly SNF 2007-10-26 11:21:23: RF power exceeding setpoint in recipe 1 step 7 at time = 7s

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Oct 29 08:10:03 PDT 2007

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Changed rf low fat tuning setting, run dummie wafer
w/out problem.

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