Comment lampoly SNF 2007-10-29 11:29:46: rf error

chingmei at snf.stanford.edu chingmei at snf.stanford.edu
Mon Oct 29 11:29:46 PDT 2007


rf error shown up when  my first wafer was in the chamber, but after cleaning the alarm once, it didn't show up again.  (I ran 6 dummy wafers)




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