From chingmei at snf.stanford.edu Wed Sep 5 10:59:56 2007 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Wed, 5 Sep 2007 10:59:56 -0700 Subject: Problem lampoly SNF 2007-09-05 10:59:56: lampoly Message-ID: My last wafer(with pieces on top) didn't come out from chamber. The screen show up with error 54 "wafer not sensed at exited cassette ." I don't know how I can do to get this wafer out. From chingmei at snf.stanford.edu Wed Sep 5 11:28:07 2007 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Wed, 5 Sep 2007 11:28:07 -0700 Subject: Shutdown lampoly SNF 2007-09-05 11:28:07: alarm 54 Message-ID: The wafer is still stuck in the chamber. From eenriquez at snf.stanford.edu Wed Sep 5 17:14:03 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Sep 2007 17:14:03 -0700 Subject: Problem lampoly SNF 2007-09-05 10:59:56: lampoly Message-ID: Recovered user's wafer. Cycled several wafers with no problems. From eenriquez at snf.stanford.edu Wed Sep 5 17:14:11 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Sep 2007 17:14:11 -0700 Subject: Shutdown lampoly SNF 2007-09-05 11:28:07: alarm 54 Message-ID: Recovered user's wafer. Cycled several wafers with no problems. From king at snf.stanford.edu Wed Sep 12 13:06:53 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 12 Sep 2007 13:06:53 -0700 Subject: Problem lampoly SNF 2007-09-12 13:06:53: RF tolerance exceeded Message-ID: Recipe 1, seasoning the chamber with bare Si wafers. Can someone come in and take a look? From king at snf.stanford.edu Wed Sep 12 14:39:50 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 12 Sep 2007 14:39:50 -0700 Subject: Problem lampoly SNF 2007-09-12 14:39:50: Turbo errors, cannot run the system Message-ID: Error 252: Turbo pumping state is not ready for system to start Error 253: Pressure exceeded 3T in chamber during turbo pumping state. From king at snf.stanford.edu Wed Sep 12 16:25:05 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 12 Sep 2007 16:25:05 -0700 Subject: Shutdown lampoly SNF 2007-09-12 16:25:04: Turbo failures Message-ID: From cbaxter at snf.stanford.edu Thu Sep 13 09:24:49 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Sep 2007 09:24:49 -0700 Subject: Comment lampoly SNF 2007-09-13 09:24:48: rf error Message-ID: rf error is due to pressure problem, i run a sf6 and o2 gas only with 50 watts lower power and able to tuned fine. From cbaxter at snf.stanford.edu Thu Sep 13 09:27:51 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Sep 2007 09:27:51 -0700 Subject: Shutdown lampoly SNF 2007-09-12 16:25:04: Turbo failures Message-ID: the throttle valve controller lose communication and close the gate valve. i reset the controller and recovered all the wafers on the tool. From cbaxter at snf.stanford.edu Thu Sep 13 09:28:54 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Sep 2007 09:28:54 -0700 Subject: Problem lampoly SNF 2007-09-12 13:06:53: RF tolerance exceeded Message-ID: From cbaxter at snf.stanford.edu Thu Sep 13 09:30:24 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 13 Sep 2007 09:30:24 -0700 Subject: Shutdown lampoly SNF 2007-09-13 09:30:23: no cl2 gas Message-ID: From mtang at snf.stanford.edu Tue Sep 18 15:58:33 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 18 Sep 2007 15:58:33 -0700 Subject: Shutdown lampoly SNF 2007-09-13 09:30:23: no cl2 gas Message-ID: HBr is available. No Cl2. From mtang at snf.stanford.edu Tue Sep 18 16:02:38 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 18 Sep 2007 16:02:38 -0700 Subject: Problem lampoly SNF 2007-09-18 16:02:37: Cl2 NOT available. But OK for HBr. Message-ID: Chlorine is still not available, but HBr is. However, be aware that excessive use of HBr-only chemistry can result in "black hair" (i.e., polymer buildup) landing on your wafers. Make sure to log in the total wafers/plasma time used in HBr-only chemistry. If problems are observed, then a chamber clean is needed.