Problem lampoly SNF 2007-09-05 10:59:56: lampoly

chingmei at snf.stanford.edu chingmei at snf.stanford.edu
Wed Sep 5 10:59:56 PDT 2007


My last wafer(with pieces on top) didn't come out from 
chamber. The screen show up with error 54 "wafer not 
sensed at exited cassette ." I don't know how I can do to get     this wafer out.  




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