Shutdown lampoly SNF 2007-09-05 11:28:07: alarm 54
chingmei at snf.stanford.edu
chingmei at snf.stanford.edu
Wed Sep 5 11:28:07 PDT 2007
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Problem lampoly SNF 2007-09-05 10:59:56: lampoly
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Shutdown lampoly SNF 2007-09-05 11:28:07: alarm 54
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The wafer is still stuck in the chamber.
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Shutdown lampoly SNF 2007-09-05 11:28:07: alarm 54
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