Problem lampoly SNF 2007-09-18 16:02:37: Cl2 NOT available. But OK for HBr.

[mtang at snf.stanford.edu]

Chlorine is still not available, but HBr is.  However, be aware that excessive use of HBr-only chemistry can result in "black hair" (i.e., polymer buildup) landing on your wafers.  Make sure to log in the total wafers/plasma time used in HBr-only chemistry.  If problems are observed, then a chamber clean is needed.