Problem lampoly SNF 2007-09-18 16:02:37: Cl2 NOT available. But OK for HBr.

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Sep 18 16:02:38 PDT 2007


Chlorine is still not available, but HBr is.  However, be aware that excessive use of HBr-only chemistry can result in "black hair" (i.e., polymer buildup) landing on your wafers.  Make sure to log in the total wafers/plasma time used in HBr-only chemistry.  If problems are observed, then a chamber clean is needed.




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