From eenriquez at snf.stanford.edu Tue Apr 1 15:02:22 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Apr 2008 15:02:22 -0700 Subject: Comment lampoly SNF 2008-04-01 15:02:22: Update Message-ID: Repaired bad O2 nupro air line connector. Re-taught the throttle valve controller. Set the transfer pressure to 0 mT instead of 90 mT. Ran 6 wafers using recipe 1 with no problems. Had the turbo not ready and the 3T fault when I ran Clean2. Did not fault when I increased the process pressure from 15 mT to 20 mT. Mary will change setpoint to Clean2 and qual process 1. From mtang at snf.stanford.edu Tue Apr 1 16:47:16 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 1 Apr 2008 16:47:16 -0700 Subject: Comment lampoly SNF 2008-04-01 16:47:15: Pressure control faults Message-ID: Tried to run dummy wafers on our standard Recipe 1, but the system kept repeatedly faulting (every wafer) for pressure control problems. Main etch did not fault, but breakthrough etch and overetch both fault for not reaching stability and/or pressure control during RF step. Think we need to do some more troubleshooting on the valve controller. From eenriquez at snf.stanford.edu Wed Apr 2 12:06:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Apr 2008 12:06:11 -0700 Subject: Comment lampoly SNF 2008-04-02 12:06:11: Update Message-ID: Re-taught the throttle valve controller with the total gas flows at 170 sccm. Ran 13 dummy wafers + 2 test wafers. Mary will check the wafers after lunch. From mtang at snf.stanford.edu Wed Apr 2 16:25:20 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 2 Apr 2008 16:25:20 -0700 Subject: Shutdown lampoly SNF 2008-02-29 17:03:46: Turbo and chamber pressure errors Message-ID: Ran more wafers and etch rate following Elmer's re-teaching of the VAT controller. Pressure controls very solidly. Etch depth expected is 4540A, actual was 4376A; etch uniformity across five points is <0.5%. Resist to silicon selectivity ~0.8. The machine seems to be running JUST FINE! From mtang at snf.stanford.edu Wed Apr 2 16:25:45 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 2 Apr 2008 16:25:45 -0700 Subject: Problem lampoly SNF 2008-02-13 20:56:47: Etch rate test not yet done Message-ID: Machine repaired and qual test done, 4/2/08. From mtang at snf.stanford.edu Wed Apr 2 16:25:54 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 2 Apr 2008 16:25:54 -0700 Subject: Problem lampoly SNF 2008-02-19 17:18:49: Etch rate looks odd. Message-ID: Machine repaired and qual test done, 4/2/08. From iwjung at snf.stanford.edu Thu Apr 3 21:53:26 2008 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 3 Apr 2008 21:53:26 -0700 Subject: Comment lampoly SNF 2008-04-03 21:53:26: Alarm Message-ID: Gas box disabled due to failure of pump or external scrubber From iwjung at snf.stanford.edu Thu Apr 3 21:56:42 2008 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 3 Apr 2008 21:56:42 -0700 Subject: Comment lampoly SNF 2008-04-03 21:56:41: Ignore my comment Message-ID: Haven't used it in a while. From eenriquez at snf.stanford.edu Tue Apr 8 09:45:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Apr 2008 09:45:34 -0700 Subject: Comment lampoly SNF 2008-04-03 21:56:41: Ignore my comment Message-ID: Noted From eenriquez at snf.stanford.edu Tue Apr 8 09:46:24 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Apr 2008 09:46:24 -0700 Subject: Comment lampoly SNF 2008-04-03 21:53:26: Alarm Message-ID: Not a problem From mtang at snf.stanford.edu Wed Apr 9 09:46:17 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 9 Apr 2008 09:46:17 -0700 Subject: Comment lampoly SNF 2008-04-09 09:46:16: Alarms observed Message-ID: Shrestha got alarms 22 and 222. Elmer cleared by resetting the system (toggle to manual and back to auto mode.) Worked OK. From sbasumal at snf.stanford.edu Thu Apr 10 17:34:41 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Thu, 10 Apr 2008 17:34:41 -0700 Subject: Problem lampoly SNF 2008-04-10 17:34:41: Water Chiller... Message-ID: has failed. Machine keeps alarming From sbasumal at snf.stanford.edu Thu Apr 10 17:35:48 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Thu, 10 Apr 2008 17:35:48 -0700 Subject: Shutdown lampoly SNF 2008-04-10 17:35:47: Message-ID: From eenriquez at snf.stanford.edu Fri Apr 11 09:01:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Apr 2008 09:01:13 -0700 Subject: Shutdown lampoly SNF 2008-04-10 17:35:47: Message-ID: Reset the chiller compressor and monitored for about 2 hours. Ran 3 wafers using the user's recipe with no problems. From eenriquez at snf.stanford.edu Fri Apr 11 09:01:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Apr 2008 09:01:25 -0700 Subject: Problem lampoly SNF 2008-04-10 17:34:41: Water Chiller... Message-ID: Reset the chiller compressor and monitored for about 2 hours. Ran 3 wafers using the user's recipe with no problems. From mtang at snf.stanford.edu Fri Apr 11 16:48:43 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 11 Apr 2008 16:48:43 -0700 Subject: Comment lampoly SNF 2008-04-11 16:48:42: Minor errors Message-ID: The system seems to have repeated MFC#8 autozero errors. It clears itself and machine seems to work fine, but worth checking into at some point. From raneeyoo at snf.stanford.edu Sun Apr 13 21:08:33 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sun, 13 Apr 2008 21:08:33 -0700 Subject: Shutdown lampoly SNF 2008-04-13 21:08:32: pumping error...samples are inside Message-ID: While I was running dummy wafers, there was an alarm, "18 Shuttle vacuum sense fail, sensor FALSE, should be TRUE." I tried to clean the message and abort the process, but the same message came again. And then, other errors came. "252 Turbo pumping system state is not ready for process to start. 253 pressure exceeded 3torr in chamber during Turbo pumping state." Dummy wafers are inside the chamber. Thanks. From eenriquez at snf.stanford.edu Mon Apr 14 10:32:40 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Apr 2008 10:32:40 -0700 Subject: Shutdown lampoly SNF 2008-04-13 21:08:32: pumping error...samples are inside Message-ID: Process kept faulting for pressure out of tolerance. Zeroed the manometer and retaught the pressure controller. Ran 3 wafers with no problems. From raneeyoo at snf.stanford.edu Mon Apr 14 17:03:40 2008 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Mon, 14 Apr 2008 17:03:40 -0700 Subject: Problem lampoly SNF 2008-04-14 17:03:39: alarm:252, 253 Message-ID: There were two alarms such as 252 and 253. After clear them, it went OK. From rik at snf.stanford.edu Wed Apr 16 13:46:22 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Wed, 16 Apr 2008 13:46:22 -0700 Subject: Problem lampoly SNF 2008-04-16 13:46:20: Random alarm of pressure outside tolerance Message-ID: The machine randomly aborts the recipe with a "pressure outside hard tolerance" msg. This happens during the first 10 secs of an etch step (can be any of BT, ME or OE). Re-running the recipe on the same wafer works fine. From eenriquez at snf.stanford.edu Wed Apr 16 18:23:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:23:09 -0700 Subject: Comment lampoly SNF 2008-02-29 14:29:07: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:23:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:23:23 -0700 Subject: Comment lampoly SNF 2008-03-03 13:10:37: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:23:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:23:30 -0700 Subject: Comment lampoly SNF 2008-03-05 17:45:02: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:23:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:23:57 -0700 Subject: Comment lampoly SNF 2008-03-07 14:14:43: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:24:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:24:30 -0700 Subject: Comment lampoly SNF 2008-03-10 14:31:12: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:24:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:24:41 -0700 Subject: Comment lampoly SNF 2008-03-12 18:41:00: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:24:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:24:49 -0700 Subject: Comment lampoly SNF 2008-03-13 15:21:20: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:24:58 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:24:58 -0700 Subject: Comment lampoly SNF 2008-03-14 14:21:15: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:25:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:25:12 -0700 Subject: Comment lampoly SNF 2008-03-18 14:20:01: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:25:17 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:25:17 -0700 Subject: Comment lampoly SNF 2008-03-19 18:40:56: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:25:26 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:25:26 -0700 Subject: Comment lampoly SNF 2008-03-26 11:26:50: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:25:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:25:33 -0700 Subject: Comment lampoly SNF 2008-03-31 16:31:36: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:26:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:26:35 -0700 Subject: Comment lampoly SNF 2008-04-01 15:02:22: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:26:49 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:26:49 -0700 Subject: Comment lampoly SNF 2008-04-02 12:06:11: Update Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:27:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:27:19 -0700 Subject: Comment lampoly SNF 2008-04-09 09:46:16: Alarms observed Message-ID: Noted. From eenriquez at snf.stanford.edu Wed Apr 16 18:27:25 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Apr 2008 18:27:25 -0700 Subject: Comment lampoly SNF 2008-04-01 16:47:15: Pressure control faults Message-ID: Noted. From eenriquez at snf.stanford.edu Thu Apr 17 11:46:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Apr 2008 11:46:45 -0700 Subject: Problem lampoly SNF 2008-04-16 13:46:20: Random alarm of pressure outside tolerance Message-ID: Might be recipe related. I had the same errors when I ran recipe 99 but I was able to run 6 wafers using recipe 1 From rik at snf.stanford.edu Thu Apr 17 22:28:34 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Thu, 17 Apr 2008 22:28:34 -0700 Subject: Problem lampoly SNF 2008-04-17 22:28:34: Recipe 99 keeps aborting Message-ID: Alarms with an RF exceeds hard tolerance error in step 2. Recipe failed twice. Increased hard tolerance to 20% from 10% for now. From rhenn at snf.stanford.edu Tue Apr 22 22:44:21 2008 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Tue, 22 Apr 2008 22:44:21 -0700 Subject: Problem lampoly SNF 2008-04-22 22:44:16: Recipe 99 aborts with hard set to 20% Message-ID: Recipe 99 (chambe clean recipe) aborts with rf power exceeding hard limit. the abort occurs after the reflection jumps up (~200 - 250 V) while the forward rf pwer dramatically decreases (~600 - 640 V). This occurs around 1:15 into step 2 of the recipe. From rik at snf.stanford.edu Sun Apr 27 14:20:38 2008 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Sun, 27 Apr 2008 14:20:38 -0700 Subject: Comment lampoly SNF 2008-04-27 14:20:37: Need more oxide wafers for Recipe 99 Message-ID: