Comment lampoly SNF 2008-04-01 15:02:22: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 1 15:02:22 PDT 2008


Repaired bad O2 nupro air line connector.  Re-taught the throttle valve controller.  Set the transfer pressure to 0 mT instead of 90 mT. 
Ran 6 wafers using recipe 1 with no problems.  Had the turbo not ready and the 3T fault when I ran Clean2.  Did not fault when I increased the process pressure from 15 mT to 20 mT.
Mary will change setpoint to Clean2 and qual process 1.




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