Comment lampoly SNF 2008-04-01 16:47:15: Pressure control faults

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Apr 1 16:47:16 PDT 2008


Tried to run dummy wafers on our standard Recipe 1, but the system kept repeatedly faulting (every wafer) for pressure control problems.  Main etch did not fault, but breakthrough etch and overetch both fault for not reaching stability and/or pressure control during RF step.  Think we need to do some more troubleshooting on the valve controller.




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