Comment lampoly SNF 2008-04-02 12:06:11: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Apr 2 12:06:11 PDT 2008


Re-taught the throttle valve controller with the total gas flows at 170 sccm.  Ran 13 dummy wafers + 2 test wafers.  Mary will check the wafers after lunch.




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