Problem lampoly SNF 2008-02-13 20:56:47: Etch rate test not yet done
mtang at snf.stanford.edu
mtang at snf.stanford.edu
Wed Apr 2 16:25:45 PDT 2008
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Shutdown lampoly SNF 2008-02-29 17:03:46: Turbo and chamber pressure errors
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Problem lampoly SNF 2008-02-19 17:18:49: Etch rate looks odd.
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Machine repaired and qual test done, 4/2/08.
Previous message:
Shutdown lampoly SNF 2008-02-29 17:03:46: Turbo and chamber pressure errors
Next message:
Problem lampoly SNF 2008-02-19 17:18:49: Etch rate looks odd.
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