Comment lampoly SNF 2008-04-03 21:53:26: Alarm
iwjung at snf.stanford.edu
iwjung at snf.stanford.edu
Thu Apr 3 21:53:26 PDT 2008
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Problem lampoly SNF 2008-02-19 17:18:49: Etch rate looks odd.
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Comment lampoly SNF 2008-04-03 21:53:26: Alarm
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Gas box disabled due to failure of pump or external scrubber
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Problem lampoly SNF 2008-02-19 17:18:49: Etch rate looks odd.
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Comment lampoly SNF 2008-04-03 21:53:26: Alarm
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