Problem lampoly SNF 2008-04-10 17:34:41: Water Chiller...

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 11 09:01:25 PDT 2008


Reset the chiller compressor and monitored for about 2 hours.  Ran 3 wafers using the user's recipe with no problems.




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