Shutdown lampoly SNF 2008-04-13 21:08:32: pumping error...samples are inside

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Sun Apr 13 21:08:33 PDT 2008


While I was running dummy wafers, there was an alarm, "18 Shuttle vacuum sense fail, sensor FALSE, should be TRUE."
I tried to clean the message and abort the process, but the same message came again.  And then, other errors came.
"252 Turbo pumping system state is not ready for process to start.
253 pressure exceeded 3torr in chamber during Turbo pumping state."
Dummy wafers are inside the chamber.
Thanks.




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