Shutdown lampoly SNF 2008-04-13 21:08:32: pumping error...samples are inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Apr 14 10:32:40 PDT 2008


Process kept faulting for pressure out of tolerance.  Zeroed the manometer and retaught the pressure controller.  Ran 3 wafers with no problems.




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