Problem lampoly SNF 2008-04-16 13:46:20: Random alarm of pressure outside tolerance

rik at rik at
Wed Apr 16 13:46:22 PDT 2008

The machine randomly aborts the recipe with a "pressure outside hard tolerance" msg. This happens during the first 10 secs of an etch step (can be any of BT, ME or OE). Re-running the recipe on the same wafer works fine.

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