Problem lampoly SNF 2008-04-16 13:46:20: Random alarm of pressure outside tolerance

rik at snf.stanford.edu rik at snf.stanford.edu
Wed Apr 16 13:46:22 PDT 2008


The machine randomly aborts the recipe with a "pressure outside hard tolerance" msg. This happens during the first 10 secs of an etch step (can be any of BT, ME or OE). Re-running the recipe on the same wafer works fine.




More information about the lampoly-pcs mailing list