Problem lampoly SNF 2008-04-16 13:46:20: Random alarm of pressure outside tolerance

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Apr 17 11:46:45 PDT 2008


Might be recipe related.  I had the same errors when I ran recipe 99 but I was able to run 6 wafers using recipe 1




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