Problem lampoly SNF 2008-04-22 22:44:16: Recipe 99 aborts with hard set to 20%

rhenn at snf.stanford.edu rhenn at snf.stanford.edu
Tue Apr 22 22:44:21 PDT 2008


Recipe 99 (chambe clean recipe) aborts with rf power exceeding hard limit. the abort occurs after the reflection jumps up (~200 - 250 V) while the forward rf pwer dramatically decreases (~600 - 640 V). This occurs around 1:15 into step 2 of the recipe. 




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